| 6937005 |
Rotating gripper wafer flipper |
Willard L. Hofer, Joe Lee Phillips |
2005-08-30 |
| 6909276 |
Rotating gripper wafer flipper |
Willard L. Hofer, Joe Lee Phillips |
2005-06-21 |
| 6828772 |
Rotating gripper wafer flipper |
Willard L. Hofer, Joe Lee Phillips |
2004-12-07 |
| 6599571 |
Spin coating methods |
— |
2003-07-29 |
| 6511540 |
Spin coating spindle and chuck assembly |
— |
2003-01-28 |
| 6477440 |
Methods of treating a semiconductor wafer |
— |
2002-11-05 |
| 6417117 |
Spin coating spindle and chuck assembly |
— |
2002-07-09 |
| 6403933 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
2002-06-11 |
| 6221157 |
Spin coating bowl exhaust system |
John S. Molebash, Bruce L. Hayes, John Davlin |
2001-04-24 |
| 6171402 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
2001-01-09 |
| 6162294 |
Spin coating bowl exhaust system |
John S. Molebash, Bruce L. Hayes, John Davlin |
2000-12-19 |
| 6162295 |
Spin coating spindle and chuck assembly |
— |
2000-12-19 |
| 6150638 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
2000-11-21 |
| 6132802 |
Methods for exhausting a wafer coating apparatus |
John S. Molebash, Bruce L. Hayes, John Davlin |
2000-10-17 |
| 6113694 |
Substrate treatment apparatus |
— |
2000-09-05 |
| 6107609 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
2000-08-22 |
| 6090209 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
2000-07-18 |
| 6061605 |
Methods of treating a semiconductor wafer |
— |
2000-05-09 |
| 6051074 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
2000-04-18 |
| 5985031 |
Spin coating spindle and chuck assembly |
— |
1999-11-16 |
| 5885353 |
Thermal conditioning apparatus |
Timothy A. Strodtbeck, John S. Molebash, Bruce L. Hayes, Rex A. Smith |
1999-03-23 |
| 5779799 |
Substrate coating apparatus |
— |
1998-07-14 |
| 5769945 |
Spin coating bowl exhaust system |
John S. Molebash, Bruce L. Hayes |
1998-06-23 |
