| 7102737 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light |
Mark Eyolfson, Elton J. Hochhalter, David Johnson, Peter S. Frank |
2006-09-05 |
| 6937005 |
Rotating gripper wafer flipper |
Willard L. Hofer, Shawn D. Davis |
2005-08-30 |
| 6909276 |
Rotating gripper wafer flipper |
Willard L. Hofer, Shawn D. Davis |
2005-06-21 |
| 6831734 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light |
Mark Eyolfsou, Elton J. Hochhalter, David Johnson, Peter S. Frank |
2004-12-14 |
| 6828772 |
Rotating gripper wafer flipper |
Willard L. Hofer, Shawn D. Davis |
2004-12-07 |
| 6704107 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light |
Mark Eyolfson, Elton J. Hochhalter, David Johnson, Peter S. Frank |
2004-03-09 |
| 6429928 |
Method and apparatus employing external light source for endpoint detection |
David Johnson, Todd Nielsen, Robert James Hatfield |
2002-08-06 |
| 6369887 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light |
Mark Eyolfson, Elton J. Hochhalter, David Johnson, Peter S. Frank |
2002-04-09 |
| 6256094 |
Method and apparatus for automated, in situ material detection using filtered fluoresced, reflected, or absorbed light |
Mark Eyolfson, Elton J. Hochhalter, David Johnson, Peter S. Frank |
2001-07-03 |
| 6179448 |
Automated light tuner |
David Johnson, Peter S. Frank, Robert James Hatfield |
2001-01-30 |
| 5969805 |
Method and apparatus employing external light source for endpoint detection |
David Johnson, Todd Nielsen, Robert James Hatfield |
1999-10-19 |
