Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for thermal control of variously sized articles in vacuum

Apparatus for thermal control of variously sized articles in vacuum

US Patent 6183523 · Granted Feb 6, 2001

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for surface processing of a substrate using an energetic pa2015
Charged particle source and operation thereof2007
Sputtering apparatus with isolated coolant and sputtering target therefor2004
Method and apparatus for sputter coating with variable target to substrate spaci2003
Cathode having variable magnet configuration2002
Method and system using power modulation for maskless vapor deposition of spatia2002
Method and apparatus for sputter coating with variable target to substrate spaci2002
Wafer holder and clamping ring therefor for use in a deposition chamber2001
Physical vapor processing of a surface with non-uniformity compensation2001
Vacuum processing apparatus with low particle generating vacuum seal2000
Process equipment with simultaneous or sequential deposition and etching capabil1999
Apparatus and method for clamping a substrate1999