Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Vacuum processing apparatus with low particle generating vacuum seal

Vacuum processing apparatus with low particle generating vacuum seal

US Patent 6032419 · Granted Mar 7, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Sputtering apparatus with isolated coolant and sputtering target therefor2004
Method and apparatus for sputter coating with variable target to substrate spaci2003
Cathode having variable magnet configuration2002
Method and apparatus for sputter coating with variable target to substrate spaci2002
Physical vapor processing of a surface with non-uniformity compensation2001
Apparatus for thermal control of variously sized articles in vacuum2001
Apparatus and method for clamping a substrate1999
Composite backing plate for a sputtering target1999
Method and apparatus for forming a magnetically oriented thin film1998
Magnetic device for rotating a substrate1998
Sputtering cathode with uniformity compensation1998
Method of pretexturing a cathode sputtering target and sputter coating an articl1997