Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for forming a bonded silicon-glass pressure sensor with strengthened corners

Method for forming a bonded silicon-glass pressure sensor with strengthened corners

US Patent 6089099 · Granted Jul 18, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pressure sensor adjustment using backside mask2009
Gating voltage control system and method for electrostatically actuating a micro2009
Extremely low cost pressure sensor realized using deep reactive ion etching2006
Process for manufacturing mirror devices using semiconductor technology2003
Method for fabricating improved mirror arrays for physical separation2003
Anodically bonded, gas impervious cavity structures fabricated in silicon2002
Process for manufacturing mirror devices using semiconductor technology2002
Device for fabricating improved mirror arrays for physical separation2002
Monolithic flow sensor and pressure sensor2000
Silicon sensor contact with platinum silicide, titanium/tungsten and gold2000
Silicon sensor contact with platinum silicide, titanium/tungsten and gold2000
Low pressure sensor with a thin boss and method of manufacture2000