Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7473859 | Gating voltage control system and method for electrostatically actuating a micro-electromechanical device | Joshua Isaac Wright, Kanakasabapathi Subramanian, William James Premerlani, John Norton Park, Christopher Fred Keimel +4 more | 2009-01-06 |
| 6577427 | Process for manufacturing mirror devices using semiconductor technology | Dale A. Gee | 2003-06-10 |
| 6527965 | Method for fabricating improved mirror arrays for physical separation | Dale A. Gee, Xiao Yang | 2003-03-04 |
| 6429033 | Process for manufacturing mirror devices using semiconductor technology | Dale A. Gee | 2002-08-06 |
| 6407844 | Device for fabricating improved mirror arrays for physical separation | Xiao Yang, Dale A. Gee | 2002-06-18 |
| 6107170 | Silicon sensor contact with platinum silicide, titanium/tungsten and gold | Henry V. Allen | 2000-08-22 |
| 6093579 | Low pressure sensor with a thin boss and method of manufacture | — | 2000-07-25 |
| 6089099 | Method for forming a bonded silicon-glass pressure sensor with strengthened corners | Henry V. Allen | 2000-07-18 |