| 7487681 |
Pressure sensor adjustment using backside mask |
— |
2009-02-10 |
| 7111518 |
Extremely low cost pressure sensor realized using deep reactive ion etching |
Stephen C. Terry, James W. Knutti |
2006-09-26 |
| 6467354 |
Anodically bonded, gas impervious cavity structures fabricated in silicon |
— |
2002-10-22 |
| 6150681 |
Monolithic flow sensor and pressure sensor |
— |
2000-11-21 |
| 6107170 |
Silicon sensor contact with platinum silicide, titanium/tungsten and gold |
Abhijeet D. Sathe |
2000-08-22 |
| 6089099 |
Method for forming a bonded silicon-glass pressure sensor with strengthened corners |
Abhijeet D. Sathe |
2000-07-18 |
| 5445006 |
Self-testable micro-accelerometer and method |
Stephen C. Terry, Diederik W. De Bruin |
1995-08-29 |
| 5253510 |
Self-testable micro-accelerometer |
Stephen C. Terry, Diederik W. De Bruin |
1993-10-19 |
| 5103667 |
Self-testable micro-accelerometer and method |
Stephen C. Terry, Diederik W. De Bruin |
1992-04-14 |
| 4884223 |
Dynamic force measurement system |
Lloyd D. Ingle, James W. Knutti |
1989-11-28 |
| 4861420 |
Method of making a semiconductor transducer |
James W. Knutti, Kurt E. Petersen, Carl R. Kowalski |
1989-08-29 |
| 4737660 |
Trimmable microminiature force-sensitive switch |
John H. Jerman, Stephen C. Terry |
1988-04-12 |
| 4680606 |
Semiconductor transducer |
James W. Knutti, Kurt E. Petersen, Carl R. Kowalski |
1987-07-14 |
| 4636714 |
Capacitive transducer and method |
— |
1987-01-13 |
| 4588978 |
Remote switch-sensing system |
— |
1986-05-13 |
| 4543457 |
Microminiature force-sensitive switch |
Kurt E. Petersen, James W. Knutti |
1985-09-24 |