Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Process for manufacturing mirror devices using semiconductor technology

Process for manufacturing mirror devices using semiconductor technology

US Patent 6577427 · Granted Jun 10, 2003

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Pressure sensor assembly2013
Gating voltage control system and method for electrostatically actuating a micro2009
Method for fabricating improved mirror arrays for physical separation2003
Method for fabricating improved mirror arrays for physical separation2003
Integrated mirror array and circuit device2003
Optical switching apparatus2002
Process for manufacturing mirror devices using semiconductor technology2002
Process for manufacturing mirror devices using semiconductor technology2002
Device for fabricating improved mirror arrays for physical separation2002
Device for fabricating improved mirror arrays for physical separation2002
Silicon sensor contact with platinum silicide, titanium/tungsten and gold2000
Low pressure sensor with a thin boss and method of manufacture2000