Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › PECVD of compounds of silicon from silane and nitrogen

PECVD of compounds of silicon from silane and nitrogen

US Patent 6040022 · Granted Mar 21, 2000

Estimated economic value: $238,998,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Low temperature deposition of iridium containing films2024
Shingled solar cell module2024
Shingled solar cell module2024
Roll-aboard travel bag2024
Gas diffusion shower head design for large area plasma enhanced chemical vapor d2023
Low temperature deposition of iridium containing films2023
Apparatus for increasing flux from an ampoule2023
RF choke for gas delivery to an RF driven electrode in a plasma processing appar2022
Shingled solar cell module2022
Roll-aboard garment bag2022
Apparatus and method for providing uniform flow of gas2022
Apparatus for increasing flux from an ampoule2021