Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Surface modification of semiconductors using electromagnetic radiation

Surface modification of semiconductors using electromagnetic radiation

US Patent 6015759 · Granted Jan 18, 2000

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Photovoltaic module support clamp assembly2016
Method for forming TiSiN thin film layer by using atomic layer deposition2015
Photovoltaic module support clamp assembly2015
Transient enhanced atomic layer deposition2011
Method and apparatus for introduction of solid precursors and reactants into a s2005
Method for the formation of diffusion barrier2005
Passivation method for improved uniformity and repeatability for atomic layer de2004
Low dielectric constant materials prepared from photon or plasma assisted chemic2003
Forming metal-derived layers by simultaneous deposition and evaporation of metal2003
Precursors for making low dielectric constant materials with improved thermal st2003
Low dielectric constant materials with improved thermal and mechanical propertie2001
Precursors for making low dielectric constant materials with improved thermal st2001