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Home › Cast metal seal for semiconductor substrates and process thereof

Cast metal seal for semiconductor substrates and process thereof

US Patent 5821161 · Granted Oct 13, 1998

Estimated economic value: $13,371,000 ⓘ

Assignee

IBM

Inventors

James H. Covell (16 patents)
Lannie R. Bolde (25 patents)
David L. Edwards (63 patents)
Lewis S. Goldmann (35 patents)
Peter A. Gruber (121 patents)
Hilton T. Toy (86 patents)

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