Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for cryogenically cooling a deposition chamber

Method and apparatus for cryogenically cooling a deposition chamber

US Patent 5806319 · Granted Sep 15, 1998

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tree spade for ATV2009
Apparatus and method for washing substrate2002
Apparatus and method for washing substrate2000
Internally heated pyrolysis zone2000
Internally heated pyrolysis zone2000
Internally heated pyrolysis zone2000
Continuous vapor deposition apparatus1999
Parylene polymer layers1999
Parylene polymer layers1999
Parylene polymer layers1999
Parylene deposition apparatus including a heated and cooled dimer crucible1998
Parylene deposition apparatus including a heated and cooled dimer crucible1998