Composition for photoimaging

Assignee

• IBM

Inventors

• Robert David Allen (115 patents)
• Richard A. Day (20 patents)
• Donald Herman Glatzel (18 patents)
• William D. Hinsberg (10 patents)
• John R. Mertz (5 patents)
• David J. Russell (87 patents)
• Gregory Michael Wallraff (59 patents)

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