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Home › Method and apparatus for determining the thickness and elemental composition of a thin film using radioisotopic X-ray fluorescence (RXRF)

Method and apparatus for determining the thickness and elemental composition of a thin film using radioisotopic X-ray fluorescence (RXRF)

US Patent 5657363 · Granted Aug 12, 1997

Estimated economic value: $11,591,000 ⓘ

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