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Home › Process for producing a positive pattern utilizing naphtho quinone diazide compound having non-metallic atom directly bonded to the naphthalene ring

Process for producing a positive pattern utilizing naphtho quinone diazide compound having non-metallic atom directly bonded to the naphthalene ring

US Patent 5567569 · Granted Oct 22, 1996

Estimated economic value: $11,193,000 ⓘ

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