Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Blanks for phase shift photomasks, and phase shift photomasks

Blanks for phase shift photomasks, and phase shift photomasks

US Patent 5561009 · Granted Oct 1, 1996

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Positive electrode active material particle2025
Method for forming positive electrode active material2025
Power storage system2025
Gas generator2025
Semiconductor device and manufacturing method of semiconductor device2025
Positive electrode active material, method for manufacturing positive electrode 2025
Positive electrode active material, method for manufacturing positive electrode 2025
Metal oxide film and method for forming metal oxide film2025
Method for manufacturing positive electrode active material, and secondary batte2025
Circuit board, semiconductor apparatus, and electronic equipment2025
Semiconductor storage device2025
Plasma processing apparatus2025