Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Positive resist composition containing naphthoquinonediazide compound having non-metallic atom directly bonded to the naphthalene ring

Positive resist composition containing naphthoquinonediazide compound having non-metallic atom directly bonded to the naphthalene ring

US Patent 5552256 · Granted Sep 3, 1996

Estimated economic value: $8,127,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Forming multiple aerial images in a single lithography exposure pass2024
Method and apparatus for imaging using narrowed bandwidth2023
Forming multiple aerial images in a single lithography exposure pass2022
Optimization of source and bandwidth for new and existing patterning devices2019
Wafer-based light source parameter control2019
Control of a spectral feature of a pulsed light beam2018
Wafer-based light source parameter control2018
Controlling for wafer stage vibration2017
Integrated circuit with degradation monitoring2016
Multi-exposure lithography employing a single anti-reflective coating layer2013
Method of making a semiconductor device using negative photoresist2012
Nanostructure for molecular electronics comprising collinear metal lines definin2011