Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Barrier layers and aluminum contacts

Barrier layers and aluminum contacts

US Patent 5504043 · Granted Apr 2, 1996

Estimated economic value: $86,720,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Refurbishment of sputtering targets2009
Coating for aluminum component2008
Polishing pad conditioner with shaped abrasive patterns and channels2006
Plasma preclean with argon, helium, and hydrogen gases2006
Reducing particle generation during sputter deposition2006
Sequential sputter and reactive precleans of vias and contacts2006
Semiconductor wafer preheating2006
Polishing pad conditioner and methods of manufacture and recycling2005
Method and apparatus for improving sidewall coverage during sputtering in a cham2005
Method for recrystallizing metal in features of a semiconductor chip2004
Method and apparatus for processing substrates in a system having high and low p2004
Method and apparatus for balancing an electrostatic force produced by an electro2003