Highly purified metal material and sputtering target using the same

Assignee

• Kabushiki Kaisha Toshiba

Inventors

• Takashi Ishigami (64 patents)
• Minoru Obata (13 patents)
• Mituo Kawai (27 patents)
• Michio Satou (14 patents)
• Takashi Yamanobe (20 patents)
• Toshihiro Maki (26 patents)
• Noriaki Yagi (49 patents)
• Shigeru Ando (50 patents)

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