Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate

Powered load lock electrode/substrate assembly including robot arm, optimized for plasma process uniformity and rate

US Patent 4657618 · Granted Apr 14, 1987

Estimated economic value: $1,895,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Multi-axial fabric2024
Machine learning based highway radar vehicle classification across multiple lane2022
LIDAR instrument and method for operating a LIDAR instrument2022
Multi-axial fabric2020
Wireless charging assembly for a vehicle2017
Vehicle body structure2017
Energy harvesting module and illumination member for a vehicle2017
Vehicle illumination assembly with energy harvesting device2017
Vehicle with an auxiliary power pack2017
Under vehicle illumination2017
Vehicle illumination assembly2016
Lighted vehicle cargo area arrangement2015