{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Plasma etching with tracer", "item": "https://www.patentleaderboard.com/patent/4599134"}]}
Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Plasma etching with tracer

Plasma etching with tracer

US Patent 4599134 · Granted Jul 8, 1986

Estimated economic value: $22,430,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Tools for chemical planarization2025
Chemical planarization2023
Abrasive-free planarization for EUV mask substrates2015
Abrasive compositions for chemical mechanical polishing and methods for using sa2014
Abrasive compositions for chemical mechanical polishing and methods for using sa2013
Method for selective CMP of polysilicon2010
Method for one-to-one polishing of silicon nitride and silicon oxide2009
Polishing slurries and methods for chemical mechanical polishing2009
Method of forming printed circuit card2008
Silica and silica-based slurry2007
Chemical-mechanical polishing slurry and method2006
Slurry for chemical mechanical polishing silicon dioxide2006