Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for the photolithographic manufacture of integrated circuit elements

Apparatus for the photolithographic manufacture of integrated circuit elements

US Patent 4509852 · Granted Apr 9, 1985

Assignee

No assignee recorded.

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Interferometer for determining the position of displacement travel of a movable 1994
Interferometer head and interferometer arrangement with rigid support structure1994
Interferometer gas flow system1992
Interferometer gas flow system1992
Device for the projection copying of masks onto a workpiece1986
Device for the projection copying of masks onto a workpiece1986
Device for the projection copying of masks1986
Device for the projection copying of masks1986
Device for projection copying of masks onto a workpiece1986
Apparatus for projecting a pattern on a semiconductor substrate1986
Device for the projection printing of masks into a workpiece1985
Process for transferring a pattern onto a semiconductor disk1983