Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Apparatus for projecting a pattern on a semiconductor substrate

Apparatus for projecting a pattern on a semiconductor substrate

US Patent 4592650 · Granted Jun 3, 1986

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Input device for an electrical device2017
Illuminating module for mounting in a domestic appliance and domestic appliance 2010
Interferometer for determining the position of displacement travel of a movable 1994
Interferometer head and interferometer arrangement with rigid support structure1994
Interferometer gas flow system1992
Bleaching paper pulp with modified silicate ion exchanger and hydrogen peroxide1991
Method for facilitating the alignment of a photomask with individual fields on t1987
Device for the projection copying of masks onto a workpiece1986
Device for the projection copying of masks1986
Device for projection copying of masks onto a workpiece1986
Device for projection copying of masks onto a workpiece1986
Device for the projection printing of masks into a workpiece1985