Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359415 | Interferometer for determining the position of displacement travel of a movable measuring mirror or the like | — | 1994-10-25 |
| 5329356 | Interferometer head and interferometer arrangement with rigid support structure | Rene Lazecki | 1994-07-12 |
| 5146284 | Interferometer gas flow system | Ernst Lobach | 1992-09-08 |
| 4621922 | Device for the projection copying of masks onto a workpiece | Ernst Lobach | 1986-11-11 |
| 4619524 | Device for the projection copying of masks | Ernst Lobach | 1986-10-28 |
| 4592650 | Apparatus for projecting a pattern on a semiconductor substrate | Herbert E. Mayer | 1986-06-03 |
| 4592648 | Device for projection copying of masks onto a workpiece | Herbert E. Mayer | 1986-06-03 |
| 4509852 | Apparatus for the photolithographic manufacture of integrated circuit elements | Ernst Lobach | 1985-04-09 |
| 4346164 | Photolithographic method for the manufacture of integrated circuits | Ernst Lobach | 1982-08-24 |