Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5146284 | Interferometer gas flow system | Werner Tabarelli | 1992-09-08 |
| 4621922 | Device for the projection copying of masks onto a workpiece | Werner Tabarelli | 1986-11-11 |
| 4619524 | Device for the projection copying of masks | Werner Tabarelli | 1986-10-28 |
| 4540277 | Device for the projection printing of masks into a workpiece | Herbert E. Mayer | 1985-09-10 |
| 4509852 | Apparatus for the photolithographic manufacture of integrated circuit elements | Werner Tabarelli | 1985-04-09 |
| 4379831 | Process for transferring a pattern onto a semiconductor disk | — | 1983-04-12 |
| 4362385 | Process and arrangement for copying masks on a workpiece with arrangement for correction of alignment errors | — | 1982-12-07 |
| 4357100 | Arrangement for projection copying masks on to a work piece | Herbert E. Mayer | 1982-11-02 |
| 4346164 | Photolithographic method for the manufacture of integrated circuits | Werner Tabarelli | 1982-08-24 |