Semiconductor device with conductive liners over silicide structures and method of making the semiconductor device

Assignee

• TSMC

Inventors

• Kuan-Kan Hu (7 patents)
• Shuen-Shin Liang (54 patents)
• Chia-Hung Chu (60 patents)
• Po-Chin Chang (28 patents)
• Hsu-Kai Chang (30 patents)
• Ken-Yu Chang (36 patents)
• Wei-Yip Loh (41 patents)
• Hung-Yi Huang (53 patents)
• Harry CHIEN (7 patents)
• Sung-Li Wang (109 patents)
• Pinyen Lin (167 patents)
• Chuan-Hui SHEN (3 patents)
• Tzu-Pei Chen (9 patents)
• Yuting CHENG (6 patents)

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