Endpoint optimization for semiconductor processes

Assignee

• Applied Materials

Inventors

• Avishay Vaxman (1 patents)
• Qintao Zhang (78 patents)
• Jeffrey P. Koch (1 patents)
• David P. Surdock (3 patents)
• Wayne R. Swart (2 patents)
• David J. Lee (8 patents)
• Samphy Hong (13 patents)
• Aldrin Bernard Vincent Eddy (2 patents)
• Daniel G. Deyo (1 patents)

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