Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Optimization using a non-uniform illumination intensity profile

Optimization using a non-uniform illumination intensity profile

US Patent 12339583 · Granted Jun 24, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method for controlling a manufacturing process and associated apparatuses2025
Method for determining aberration sensitivity of patterns2025
Aberration impact systems, models, and manufacturing processes2025
Lithographic apparatus and electrostatic clamp designs2024
Alert rule system and method for updating alert rules2024
Method to manufacture nano ridges in hard ceramic coatings2024
Method of determining characteristic of patterning process based on defect for r2024
Wavefront optimization for tuning scanner based on performance matching2024
Imaging via zeroth order suppression2024
Flows of optimization for patterning processes2024
Method and apparatus for diffraction pattern guided source mask optimization2023
Method for high numerical aperture thru-slit source mask optimization2023