Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Mirror, in particular for microlithography

Mirror, in particular for microlithography

US Patent 12276917 · Granted Apr 15, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Projection objective including an optical device2025
Method for operating a LIDAR system2025
Drive device, optical system and lithography apparatus2025
Mirror, in particular for a microlithographic projection exposure apparatus2025
Modulation device, control device, optical system, lithography system and method2024
Apparatus and method for ascertaining a distance to an object2023
System, method and marker for the determination of the position of a movable obj2022
Binary passive variable stiffness joint2022
Optical arrangement and lithography apparatus2022
Mirror, in particular for a microlithographic projection exposure system2022
Mirror, in particular for a microlithographic projection exposure system2022
Method for treating a reflective optical element for the EUV wavelength range, m2022