Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask

Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask

US Patent 12259647 · Granted Mar 25, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting metho2025
Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting metho2025
Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting metho2025
Method and electronic device for improving antenna performance2025
Method of recovering bootloader in mobile electronic device and bootloader recov2025
Pellicle cleaning apparatus and pellicle cleaning method using the same2024
Method of annealing reflective photomask by using laser2024
Method of annealing reflective photomask by using laser2024
Electronic device for processing image and image processing method thereof2024
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and m2023
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and m2023
Method of annealing reflective photomask by using laser2022