Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Temperature controlled substrate carrier and polishing components

Temperature controlled substrate carrier and polishing components

US Patent 12217979 · Granted Feb 4, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method and apparatus for insitu adjustment of wafer slip detection during work p2025
Showerhead assembly for distributing a gas within a reaction chamber2025
Semiconductor processing apparatus and methods for monitoring and controlling a 2025
Atmospheric plasma in wafer processing system optimization2025
Containment and exhaust system for substrate polishing components2024
Containment and exhaust system for substrate polishing components2024
Substrate carrier head and processing system2024
Apparatus for detecting or monitoring for a chemical precursor in a high tempera2024
Method and apparatus for insitu adjustment of wafer slip detection during work p2024
Systems and methods for controlling vapor phase processing2024
Multiple temperature range susceptor, assembly, reactor and system including the2023
Planarized membrane and methods for substrate processing systems2023