Apparatus and method for generating extreme ultraviolet radiation

Assignee

• TSMC

Inventors

• Wei-Chih Lai (32 patents)
• Han-Lung Chang (54 patents)
• Chi-Ming Yang (178 patents)
• Shang-Chieh Chien (168 patents)
• Bo-Tsun Liu (55 patents)
• Li-Jui Chen (264 patents)
• Po-Chung Cheng (152 patents)

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