Assignee
- Shanghai Ic R&D Center Co.
- Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co.
Inventors
- Xi Zeng (26 patents)
- Pu Zhou (2 patents)
- Jianxian Wen (1 patents)
- Huijie Yan (6 patents)
- Xiameng Lian (2 patents)
US Patent 12126331 · Granted Oct 22, 2024