Assignee
- Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co.
- Shanghai Ic R&D Center Co.
Inventors
- Ling Shen (4 patents)
- Yu Jiang (6 patents)
- Huijie Yan (6 patents)
- Zhifang Li (9 patents)
- Linmei Dong (1 patents)
- Jiebin Duan (5 patents)
- Jianxin Wen (9 patents)