Assignee
- Shanghai Ic R&D Center Co.
- Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co.
Inventors
- Ling Shen (4 patents)
- Yu Jiang (6 patents)
- Huijie Yan (6 patents)
- Zhifang Li (9 patents)
- Jianxin Wen (9 patents)
US Patent 12373679 · Granted Jul 29, 2025