Assignee
- Shanghai Ic R&D Center Co.
- Shanghai Integrated Circuit Equipment & Materials Industry Innovation Center Co.
Inventors
- Yuhang Zhao (19 patents)
- Jianxin Wen (9 patents)
- Changming Pi (4 patents)
- Xi Zeng (26 patents)
- Ling Shen (6 patents)
US Patent 11863899 · Granted Jan 2, 2024