Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Self-aligned uniform bottom spacers for VTFETS

Self-aligned uniform bottom spacers for VTFETS

US Patent 11973125 · Granted Apr 30, 2024

Estimated economic value: $14,003,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Vertical field effect transistor with minimal contact to gate erosion2025
Asymmetric gate extension in stacked FET2025
Vertical transistor with reduced cell height2025
TSV and backside power distribution structure2025
Wraparound contact with reduced distance to channel2025
Nanowire source/drain formation for nanosheet device2025
Local enlarged via-to-backside power rail2025
Skip-level TSV with hybrid dielectric scheme for backside power delivery2025
Dual structured buried rail2025
Method and structure of forming independent contact for staggered CFET2025
Strain generation and anchoring in gate-all-around field effect transistors2025
Buried power rail with robust connection to a wrap around contact2025