Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method, substrate and system for estimating stress in a substrate

Method, substrate and system for estimating stress in a substrate

US Patent 11953837 · Granted Apr 9, 2024

Estimated economic value: $114,337,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate restraining system2025
Substrate holder for use in a lithographic apparatus2025
Substrate holder for use in a lithographic apparatus2025
Substrate holder for use in a lithographic apparatus and a device manufacturing 2025
Method of clamping a substrate to a clamping system, a substrate holder and a su2024
Method of clamping a substrate to a clamping system, a substrate holder and a su2024
Support table for a lithographic apparatus, method of loading a substrate, litho2024
Lithographic apparatus, method for unloading a substrate and method for loading 2023
Lithographic apparatus, method for unloading a substrate and method for loading 2023
Substrate holder for use in a lithographic apparatus2022
Substrate holder for use in a lithographic apparatus2022
Lithographic apparatus and a device manufacturing method2022