Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Diagnostic disc with a high vacuum and temperature tolerant power source

Diagnostic disc with a high vacuum and temperature tolerant power source

US Patent 11924972 · Granted Mar 5, 2024

Estimated economic value: $73,319,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Decontamination device2025
Substrate carrier with array of independently controllable heater elements2025
Substrate carrier with array of independently controllable heater elements2025
Pass box2025
Condition selectable backside gas2025
Decontamination system2025
Hermetic tubular linear motor based wafer lift actuator2025
Cooled substrate support assembly for radio frequency environments2025
Tunable temperature controlled substrate support assembly2025
Mist supply device2025
Advanced temperature control for wafer carrier in plasma processing chamber2025
Temperature controlled substrate support assembly2025