Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing system, vacuum substrate transfer module, and substrate transfer method

Substrate processing system, vacuum substrate transfer module, and substrate transfer method

US Patent 11862506 · Granted Jan 2, 2024

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Transfer apparatus2025
Transfer apparatus and transfer method2025
Transfer apparatus and transfer method2025
Substrate processing apparatus, purge gas control method, and vacuum transfer ch2025
Substrate processing apparatus, purge gas control method, and vacuum transfer ch2025
Measuring system, measuring device, and measuring method2025
Substrate processing apparatus2025
Transfer device, transfer system, and end effector2025
Transfer device, transfer system, and end effector2025
Substrate processing system and transfer method2024
Substrate processing system and transfer method2024
Transfer system, transfer device, and transfer method2024