Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method

Substrate processing apparatus, purge gas control method, and vacuum transfer chamber cleaning method

US Patent 12285786 · Granted Apr 29, 2025

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Transfer apparatus2025
System of processing substrate, transfer method, transfer program, and holder2025
Motorcycle or motorcycle replica2025
Transfer apparatus and transfer method2025
Transfer apparatus and transfer method2025
Measuring system, measuring device, and measuring method2025
Substrate processing apparatus2025
Transfer device, transfer system, and end effector2025
Transfer device, transfer system, and end effector2025
Imaging device with illumination unit featuring light shielding component2025
Wireless power supply unit and wireless power transmission system2024
Monitoring camera with repellent sheet adhered to tip end flange2024