Thin-film non-uniform stress evaluation

Assignee

• TSMC

Inventors

• Wei-De Ho (9 patents)
• Han-Wei Wu (20 patents)
• Pei-Sheng TANG (4 patents)
• Meng-Jung Lee (8 patents)
• Hua-Tai Lin (63 patents)
• Szu-Ping Tung (37 patents)
• Lan-Hsin Chiang (3 patents)

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