Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern

Alternating copolymer, method of producing alternating copolymer, method of producing polymeric compound, and method of forming resist pattern

US Patent 11780946 · Granted Oct 10, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor device2025
Resist composition, method of forming resist pattern, and compound2025
Resist composition, method of forming resist pattern, and compound2025
Resist composition and method of forming resist pattern2025
Resist composition, method of forming resist pattern, compound, and resin2023
Resist composition, method of forming resist pattern, and acid diffusion-control2023
Resist composition and method of forming resist pattern2023
Organically modified metal oxide nanoparticles, organically modified metal oxide2023
Organically modified metal oxide nanoparticles, organically modified metal oxide2023
Organically modified metal oxide nanoparticles, organically modified metal oxide2023
Organically modified metal oxide nanoparticles, organically modified metal oxide2023
Resist composition and method of forming resist pattern2023