{"@context": "https://schema.org", "@type": "BreadcrumbList", "itemListElement": [{"@type": "ListItem", "position": 1, "name": "Home", "item": "https://www.patentleaderboard.com/"}, {"@type": "ListItem", "position": 2, "name": "Method of reducing undesired light influence in extreme ultraviolet exposure", "item": "https://www.patentleaderboard.com/patent/11703762"}]}

Home › Method of reducing undesired light influence in extreme ultraviolet exposure

Method of reducing undesired light influence in extreme ultraviolet exposure

US Patent 11703762 · Granted Jul 18, 2023

Estimated economic value: $10,411,000 ⓘ

Assignee

TSMC

Inventors

Chih-Tsung Shih (125 patents)
Chen-Ming Wang (7 patents)
Yahru Cheng (27 patents)
Bo-Tsun Liu (55 patents)
Tsung Chuan Lee (18 patents)

View full patent text on Google Patents →