Metal etching stop layer in magnetic tunnel junction memory cells

Assignee

• TSMC

Inventors

• Tai-Yen Peng (60 patents)
• Sin-Yi Yang (22 patents)
• Chen-Jung Wang (20 patents)
• Yu-Shu Chen (50 patents)
• Chien-Chung Huang (90 patents)
• Han-Ting Lin (24 patents)
• Jyu-Horng Shieh (125 patents)
• Chih-Yuan Ting (81 patents)

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