Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate support assembly and substrate processing device including the same

Substrate support assembly and substrate processing device including the same

US Patent 11664267 · Granted May 30, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Substrate processing device2024
Substrate support assembly and substrate processing device including the same2024
Substrate support assembly and substrate processing device including the same2024
Substrate processing device2023
Substrate processing apparatus and substrate processing method2023
Substrate processing apparatus2022
Substrate processing apparatus and substrate processing method2022
Substrate processing apparatus and substrate processing method2022
Exhaust flow control ring for semiconductor deposition apparatus2020
Apparatuses and methods for treating substrate2016