Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › External heating system for use in chemical mechanical polishing system

External heating system for use in chemical mechanical polishing system

US Patent 11633829 · Granted Apr 25, 2023

Estimated economic value: $12,746,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Chemical-mechanical planarization pad and methods of use2025
CMP system and method of use2025
Dual metal gate structures on nanoribbon semiconductor devices2025
Composition and method for polishing and integrated circuit2025
Composition and method for polishing and integrated circuit2025
Composition and method for polishing and integrated circuit2025
Bevel edge removal methods, tools, and systems2025
In-situ defect count detection in post chemical mechanical polishing2025
Chemical mechanical polishing apparatus and method2025
Chemical mechanical polish slurry and method of manufacture2025
Integrated circuit photodetector2025
Temperature control in chemical mechanical polish2025