Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate

Method for manufacturing a substrate having a region mechanically decoupled from a support, method for manufacturing at least one spring, and a substrate

US Patent 11608264 · Granted Mar 21, 2023

Estimated economic value: $12,408,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Micromechanical component for a capacitive pressure sensor device, capacitive pr2025
Bond structures on MEMS element and ASIC element2025
Bond structures on MEMS element and ASIC element2025
Micromechanical component for a sensor or microphone device2025
Quick-hitch for construction vehicle tools2024
Micromechanical component for a sensor device or microphone device2024
MEMS sensor as well as method for operating a mems sensor2024
MEMS sensor as well as method for operating a mems sensor2024
Two-stage method for recovering halogenated hydrocarbons2024
Method for operating a motor vehicle, device for a motor vehicle, motor vehicle2024
Method for producing a wafer connection2024
Multiple-circuit hydraulically open braking system, in particular for a highly a2024