Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ceramic substrate and susceptor

Ceramic substrate and susceptor

US Patent 11551962 · Granted Jan 10, 2023

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Ceramic joined body, electrostatic chuck device, and method for producing cerami2025
Ceramic joined body, electrostatic chuck device, and method for producing cerami2025
Heat source unit and refrigeration device having low-stage and high-stage compre2024
Heat source unit and refrigeration apparatus2024
Composite sintered body, electrostatic chuck member, electrostatic chuck device,2024
Composite sintered body, electrostatic chuck member, electrostatic chuck device,2024
Composite sintered body, electrostatic chuck member, electrostatic chuck device,2024
Electrostatic chuck device2024
Electrostatic chuck device and method for producing electrostatic chuck device2023
Composite sintered body, electrostatic chuck member, and electrostatic chuck dev2023
Composite sintered body, electrostatic chuck member, and electrostatic chuck dev2023
Electrostatic chuck device and production method for electrostatic chuck device2023