Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate processing apparatus and substrate support

Substrate processing apparatus and substrate support

US Patent 11521886 · Granted Dec 6, 2022

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electric motor vehicle2025
Substrate support and plasma processing apparatus2025
Mounting table and plasma processing apparatus2025
Stage and plasma processing apparatus2025
Substrate support and substrate processing apparatus2024
Substrate support and substrate processing apparatus2024
Electrostatic chuck, focus ring, support base, plasma processing apparatus, and 2024
Plasma processing apparatus and method for manufacturing mounting stage2024
Plasma processing apparatus2024
Substrate support and plasma processing apparatus2024
Plasma processing apparatus and plasma processing method2024
Stage and plasma processing apparatus2024